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Innovative High Quality Plasma Etch, Deposition system, Ion Beam Etching
and Ion Beam Deposition. (RIE, PECVD, IBE, IBSD)
Pressure, Flow
Level & Temperature Products for
Ultra Clean Processing
In-Line Scrubber system to remove harmfull constituents
from the effluent gases of LPCVD,PECVD and MOCVD systems.

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Electrostatic Chuck Technology.
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