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Rapid Thermal Process
  Plasma Ash & Descum
  Plasma ETCH RIE
  Upgrade Kits for other brands ( Gasonics, AG Associates….)
Pressure, Flow
Level & Temperature Products for
Ultra Clean Processing
In-Line Scrubber system to remove harmfull constituents
from the effluent gases of LPCVD,PECVD and MOCVD systems.

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Electrostatic Chuck Technology.
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