New ALD System in glovebox now operational at STnano facility. IPCMS, Institut de physique et chimie des Matériaux de Strasbourg.
We are excited to announce that STnano new Atomic Layer Deposition (ALD) system from OkyayTech, integrated within a glovebox, is now fully installed and operational. This state-of-the-art addition significantly enhances our research capabilities, introducing Al2O3 and HfO2 deposition to our facility for the first time. https://www.ipcms.fr/actualite/new-ald-system-in-glovebox-now-operational-at-stnano-facility/
